JPS6244534Y2 - - Google Patents

Info

Publication number
JPS6244534Y2
JPS6244534Y2 JP3756883U JP3756883U JPS6244534Y2 JP S6244534 Y2 JPS6244534 Y2 JP S6244534Y2 JP 3756883 U JP3756883 U JP 3756883U JP 3756883 U JP3756883 U JP 3756883U JP S6244534 Y2 JPS6244534 Y2 JP S6244534Y2
Authority
JP
Japan
Prior art keywords
wafer
water
wafers
shaped opening
water tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3756883U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59145034U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3756883U priority Critical patent/JPS59145034U/ja
Publication of JPS59145034U publication Critical patent/JPS59145034U/ja
Application granted granted Critical
Publication of JPS6244534Y2 publication Critical patent/JPS6244534Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
JP3756883U 1983-03-17 1983-03-17 ウエハ−取扱装置 Granted JPS59145034U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3756883U JPS59145034U (ja) 1983-03-17 1983-03-17 ウエハ−取扱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3756883U JPS59145034U (ja) 1983-03-17 1983-03-17 ウエハ−取扱装置

Publications (2)

Publication Number Publication Date
JPS59145034U JPS59145034U (ja) 1984-09-28
JPS6244534Y2 true JPS6244534Y2 (en]) 1987-11-25

Family

ID=30168254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3756883U Granted JPS59145034U (ja) 1983-03-17 1983-03-17 ウエハ−取扱装置

Country Status (1)

Country Link
JP (1) JPS59145034U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011061120A (ja) * 2009-09-14 2011-03-24 Sumitomo Metal Fine Technology Co Ltd ウエハ搬送方法およびウエハ搬送装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006021647A1 (de) * 2005-11-09 2007-11-15 Coenen, Wolfgang, Dipl.-Ing. Verfahren zur Vereinzelung von scheibenförmigen Substraten unter Nutzung von Adhäsionskräften

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011061120A (ja) * 2009-09-14 2011-03-24 Sumitomo Metal Fine Technology Co Ltd ウエハ搬送方法およびウエハ搬送装置

Also Published As

Publication number Publication date
JPS59145034U (ja) 1984-09-28

Similar Documents

Publication Publication Date Title
CN106043799B (zh) 侧面周边仿形自动贴膜装置及其贴膜方法
US20080138936A1 (en) Method for laminating substrate and apparatus using the method
US3695502A (en) Bonding tool
JP3150888B2 (ja) ウエハの分離搬送装置及び分離搬送方法
GB2159763A (en) Process for sticking adhesive tape on thin article
JPH1059544A (ja) 板材の搬送装置
JPS6244534Y2 (en])
US4044937A (en) Multiple ball element wafer breaking apparatus
JPH0964152A (ja) ウェーハ単離装置
JP2001114434A (ja) 積重薄板の分離装置および方法
JP2009212430A (ja) ウエハ取り出し装置及び半導体装置の製造方法
CN212353133U (zh) 一种塑封产品以及塑封产品剥离设备
CN114695191A (zh) 带安装器
JPS62210635A (ja) 物体の分離方法及び装置
JPS6212537Y2 (en])
JPH0344754Y2 (en])
JP3867564B2 (ja) 積み重ねワークの分離方法および分離装置
JPH05152418A (ja) チツプピツクアツプ装置
KR20210018755A (ko) 수지 성형 장치 및 수지 성형품의 제조 방법
JPS621165Y2 (en])
JPH05138569A (ja) 無接触プレス
JP2607813B2 (ja) 巻テープ片とパッキンの供給方法及び装置
CN115172247A (zh) 一种芯片拾取方法及装置
JPH10109757A (ja) 積層トレーの分離装置
JP2580731Y2 (ja) ウェーハ格納・取出し装置